MATHEW, R.; SANKAR, A. R. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors. Nano-Micro Letters, [S. l.], v. 10, n. 2, p. 35, 2018. DOI: 10.1007/s40820-018-0189-1. Disponível em: https://www.nmlett.org/index.php/nml/article/view/283. Acesso em: 27 apr. 2024.