Guo, Qinhua, Zhiqing Xu, Lizhou Yang, Jingyang Zhang, Yawen Gan, Jiajun Zhang, Jiahao Jiang, and Yunda Wang. 2026. “Scalable and Sustainable Dry Microfabrication Enabled by High-Precision and Wafer-Scale Transfer Lithography of Commercial Photoresists”. Nano-Micro Letters 18 (May):357. https://doi.org/10.1007/s40820-026-02215-7.