Zhang, Zheng, Yanlin Zhang, Yuanyuan Luo, Guoliang Lv, Jianglin Yin, Pengwei Tan, and Guotao Duan. “Wafer-Level Self-Assembly and Interface Passivation Patterning Technology for Nanomaterial-Compatible 3D MEMS Sensing Chips”. Nano-Micro Letters 18 (January 26, 2026): 221. Accessed January 28, 2026. https://www.nmlett.org/index.php/nml/article/view/2364.