Han, Chengzhang, Da Chen, Yaozhong Zhang, Dong Xu, Yijian Liu, Eric Siu-Wai Kong, and Yafei Zhang. “High Potential Columnar Nanocrystalline AlN Films Deposited by RF Reactive Magnetron Sputtering”. Nano-Micro Letters 4, no. 1 (March 19, 2012): 40-44. Accessed May 4, 2024. https://www.nmlett.org/index.php/nml/article/view/723.