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Vol. 18 (2026)

Sensilla Trichoidea-Inspired, High-Temperature, and Omnidirectional Vibration Perception Based on Monolayer Graphene

https://doi.org/10.1007/s40820-025-02029-z
Yuning Li
State Key Laboratory of Advanced Rail Autonomous Operation, Beijing Jiaotong University, Beijing, People’s Republic of China
Danke Chen
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Xiaoqiu Tang
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Peizhi Yu
Department of Precision Instrument, Tsinghua University, Beijing, People’s Republic of China
Jingye Sun
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Xue Li
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Qing You
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Mingqiang Zhu
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Chang Gao
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
Linan Li
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing, People’s Republic of China
He Tian
School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, People’s Republic of China
Tao Deng
State Key Laboratory of Advanced Rail Autonomous Operation, Beijing Jiaotong University, Beijing, People’s Republic of China

Corresponding Author: Tao Deng

dengtao@bjtu.edu.cn

Nano-Micro Letters, Vol. 18 (2026), Article Number: 190

Abstract

With the convergence of sensor technology, artificial intelligence, and the Internet of Things, intelligent vibration monitoring systems are undergoing transformative development. This evolution imposes stringent demands on the miniaturization, low power consumption, high integration, and environmental adaptability of transducers. Graphene, renowned for its superlative physicochemical attributes, holds significant promise for application in micro- and nanoelectromechanical systems (M/NEMS). However, the inherent central symmetry of graphene restricts its utility in piezoelectric devices. Inspired by the sensilla trichoidea of spiders, a three-dimensional (3D) cilia-like monolayer graphene omnidirectional vibration transducer (CGVT) based on a stress-induced self-assembly mechanism is fabricated, demonstrating notable performance and high-temperature resistance. Furthermore, 3D vibration vector decoding is realized via an omnidirectional decoupling algorithm based on one-dimensional convolutional neural networks (1DCNN) to achieve precise discrimination of vibration directions. The 3D bionic vibration-sensing system incorporates a spider web structure into a bionic cilia MEMS chip through a gold wire bonding process, enabling the realization of three distinct mechanisms for vibration detection and recognition. In particular, these devices are manufactured using silicon-based semiconductor processing techniques and MEMS fabrication methodologies, leading to a substantial reduction in the dimensions of individual components compared to traditional counterparts.


Highlights:
1 Bioinspired MEMS vibration perception: The monolithic integration of three-dimensional semicircular biomimetic ‘cilia’-structured vibration transducer arrays based on monolayer graphene was achieved by a controlled stress-driven self-assembly technique.
2 High Performance: The 3D vibration transducer array enables real-time, high-performance (87.95 pC g−1), and wide-range vibration monitoring (1 Hz–10 kHz, 0–1120 g) under dynamic loading, while achieving omnidirectional vibration signal acquisition and decoupling.
3 Resistant to high temperatures: Stable vibration responses at ultrahigh temperatures up to 800 °C are achieved with merely a 20-nm-thick Si3N4 protective coating.

Keywords

Bioinspired 3D Graphene Vibration perception Monolithic integration
Li, Yuning, Danke Chen, Xiaoqiu Tang, Peizhi Yu, Jingye Sun, Xue Li, Qing You, Mingqiang Zhu, Chang Gao, Linan Li, He Tian, and Tao Deng. 2026. “Sensilla Trichoidea-Inspired, High-Temperature, and Omnidirectional Vibration Perception Based on Monolayer Graphene”. Nano-Micro Letters 18 (January):190. https://doi.org/10.1007/s40820-025-02029-z.
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